The Laboratory for Advanced Materials Processing - LAMP -
is a class 1000 clean room facility for semiconductor/nanoscale devices fabrication at the
University of Maryland. It includes a
broad variety of advanced materials processes and supporting characterization for
fabricating devices and test structures. It is affiliated with the
Department of Materials Science and Engineering, and the
Institute for Systems Research.
Main
current research activities include ultra thin film processes via Atomic Layer Deposition for high K materials and metals, fabrication of integrated micro-system
devices (microfluidics, micro-machined cantilever
libraries...), characterization of materials properties (CV, IV, sheet resistance...).
To support these activities, LAMP houses two custom-designed
systems for Atomic Layer Deposition, an advanced CVD (multi-showerhead)
processing system, a Sopra GES5 spectroscopic ellipsometer, an automated scanning probe station for optical and electrical characterization, sol-gel and photoresist spinners, annealation and oxydation furnaces, several optical
microscopes as well as a variety of chemical gas sensors (RGAs, FTIR,
acoustic sensors) for in-situ process diagnostics. |
Laboratory for
Advanced Materials Processing
