Laboratory for Advanced Materials Processing

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LAMP
2225 J.M. Patterson Bldg (#083)
University of Maryland
College Park, MD 20742
(301) 405 7250

Lab director: Gary W. Rubloff
Lab manager: Laurent Henn-Lecordier

 

Laboratory for Advanced Materials Processing

The Laboratory for Advanced Materials Processing - LAMP - is a class 1000 clean room facility for semiconductor/nanoscale devices fabrication at the University of Maryland. It includes a broad variety of advanced materials processes and supporting characterization for fabricating devices and test structures. It is affiliated with the Department of Materials Science and Engineering, and the Institute for Systems Research

Main current research activities include ultra thin film processes via   Atomic Layer Deposition for high K materials and metals, fabrication of integrated micro-system devices (microfluidics,  micro-machined cantilever libraries...), characterization of materials properties (CV, IV, sheet resistance...).

To support these activities, LAMP houses two custom-designed systems for Atomic Layer Deposition, an advanced CVD (multi-showerhead) processing system, a Sopra GES5 spectroscopic ellipsometer, an automated scanning probe station for optical and electrical characterization, sol-gel and photoresist spinners, annealation and oxydation furnaces, several optical microscopes as well as a variety of chemical gas  sensors (RGAs, FTIR, acoustic sensors) for in-situ process diagnostics.

Location and Contact

A map to locate the LAMP clean room is available here.

Additional information can be be provided by contacting members of the LAMP management team.

Lab Director:

Gary W. Rubloff

Lab Manager

        Laurent Henn-Lecordier

In case of emergency contact lab manager at 301 602 9858

 

LAMP Links

 

For questions or comments about this website, please contact the lab manager.
We would to acknowledge Dr. Don DeVoe's contribution who graciously let us use sections of his own site at http://www.enme.umd.edu/mml/
Last update: jan. 2008 by Henn-Lecordier