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Gas Materials Safety Data Sheets
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You can download MSDS for the gases currently used
in LAMP. These MSDS should be carefully read by everyone working in the lab.
Chemicals Materials Safety Data Sheets
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Chemicals used in LAMP are listed bellow. MSDS are either available
on-line or can be found in the MSDS notebook located at the entrance of the
cleanroom. Review them carefully. If you find out that a document is missing,
please inform the lab manager.
|
Chemical |
Supplier |
Volume |
MSDS |
|
Acetone,
99.9+% |
Sigma
Aldrich |
2L |
download |
|
Ammonium
cerium nitrate |
Aldrich |
50g |
download |
| Ammonium hydroxide |
Fisher |
2.5L |
download |
|
AZ
400K Developer |
Clariant |
1Ga |
download |
| Bis-cyclopentadienyl Magnesium |
Epichem |
50g |
download |
|
Bismuth
acetate |
Alfa
Aesar |
50g |
download |
|
1-
Butanol,
99.8% |
Aldrich |
1L |
download |
|
Ethyl
alcohol, reagent |
Aldrich |
1L |
download |
|
Gold |
Alfa
Aesar |
1g |
download |
|
Gold etch -
iodine |
Transene |
500 ml |
download |
| Hafnium tetrakis methyl ethyl amide TEMAH |
Aldrich |
100g |
download |
| Hafnium tetrakis dimethyl amide TDMAH |
Aldrich |
50 g |
download |
|
Hydrochloric acid 30% |
Fisher Scientific |
500 ml |
download |
|
Hydrofluoric acid
10% |
Alfa
Aesar |
1l |
download |
|
Hydrofluoric acid
37% |
Alfa
Aesar |
1l |
download |
|
Hydrofluoric
acid, ammonium fluoride 6:1 (Buffered Oxide Etch) |
JT
Baker |
9lb |
download |
|
Hydrogen
peroxide H2O2 30% |
Fisher
Scientific |
500ml |
download |
|
Lead
Titanium Isopropoxide |
Alfa
Aesar |
100ml |
download |
|
Lead
Zirconium ethylhexano isopropoxide, 10%W/V |
Alfa
Aesar |
100ml |
download |
|
Methanol |
J.T.Baker |
4L |
download |
|
2-Methoxy
ethanol, 99% |
Alfa
Aesar |
1L |
download |
|
Methylsilsquioxane
35% in mix solvents |
|
100ml |
download |
|
Nitric
acid 70% |
Fisher
Scientific |
2.5l |
download |
|
Octadecyltrichlorosilane |
Gelest |
100 ml |
download |
| Phosphoric acid |
Fisher Scientific |
2.5L |
download |
|
Platinum |
Alfa
Aesar |
5g |
download |
|
1-Propanol,
99.5% |
Fisher
Scientific |
500ml |
download |
|
2-Propanol |
Aldrich |
4L |
download |
|
PZT
(PbZrTi) Sol-gel Standard |
Mitsubishi |
|
download1 |
|
Sodium
hydroxide |
Sigma
Chem. |
|
download |
| Sodium silicate 14% NaOH, 27% SiO2 |
Sigma |
1L |
download |
|
SU-8 developer |
Micro Chem |
|
download |
|
SU-8 resist |
Micro Chem |
|
download |
|
Sulfuric
acid |
Fisher
Scientific |
2.5l |
download |
|
Tetrachloro
ethylene (TCE) 1,1,2 |
Alfa Aesar |
4L |
download |
|
Tetramethyl
ammonium hydroxyde |
Aldrich |
1l |
download |
| Titanium
2-ethyl hexoxide |
Alfa
Aesar |
500g |
download |
| Titanium isopropoxide |
InorgTech |
100g |
download |
| Titanium tetrakis dimethyl amide TDMAT |
Aldrich |
100g |
download |
| Trimethyl indium (TMI) |
Epichem |
50g |
download |
|
Toluene |
Fisher
Scientific |
4L |
download |
|
Xylene |
Fisher
Scientific |
1l |
download |
|
Zinc
2-Ethylhexanoate |
Alfa
Aesar |
100gm |
download |
|
Zinc
neodecanoate |
Alfa
Aesar |
250g |
download |
|
Zirconium
2-ethylhexanoate |
Alfa
Aesar |
100gm |
download |
|
(1)
Some pdf file might require the installation of the Adobe Japanese
language package. You can download it from here. |
|
Last update: May 2008 by L. Henn-Lecordier |
|
Laboratory for
Advanced Materials Processing