LAMP Pictures


LAMP clean room	ULVAC CVD cluster tool	Plasma cleaning	Ulvac reactor schematic

Programmable multi segment CVD reactor	Programable reactor	Gas delivery system	Programmable reactor 1st version on ULVAC

3 segment shower head	UHV Atomic Layer Depositon system	ALD reactor	ALD reactor

ALD substrate heater	Automated 4 point probe	4 point probe	4 point probe GUI

Acoustic sensing downstream to a a CVD reactor	MAS 400 mask aligner	E-beam metal evaporator	In-situ sensing by mass-spectrometry
Control of MOCVD source delivery rate by acoustic sensing