|
| |
|
Gary
Rubloff's research group
|
-
Electronic materials, processes, and equipment Combinatorial CVD
and ALD Atomic layer deposition Semiconductor materials, processing,
and characterization
-
Semiconductor manufacturing Sensing and advanced process control
for widegap semiconductor growth Real-time chemical process sensing
for metrology and advanced process control Simulation and
optimization in dynamic process systems
- Programmable
biopolymer deposition BioMEMS devices, process integration,
packaging, and control Real-time diagnostics
-
Nanoscale systems Nanocomponent fabrication Nanocomponent
decoration Directed assembly
|
|
Ichiro
Takeuchi's research group
|
-
Fabrication
micro-machined cantilever
libraries for combinatorial investigation of shape memory alloys
|
|
Manfred Wuttig's
research group
|
- Fabrication of micromachined cantilevers and membranes for shape
memory application
- Sol-gel PZT thin film processing
- Development of a system to study the piezoelectric properties of thin
films using actuation of cantilevers.
|
|
Laboratory for
Advanced Materials Processing